Veldhoven, Netherlands
Internship Explorer
Internship Explorer
The Tribology and Electrostatics research group of ASML looks into the long-term solution roadmap for ASML. For this purpose, we explore various technological solutions that are not mature yet. At the moment, we are working on dielectric materials for high-precision electro-mechanical systems. When an electric field is applied and subsequently removed, these materials exhibit dielectric relaxation, leading to a time dependent decay of surface potential. In practical applications, this decay directly translates into pressure drift, negatively affecting positioning accuracy and system stability. Since dielectric relaxation behavior is repeatable and history‑dependent, it offers an opportunity for feedforward compensation. This internship focuses on developing and validating such a feedforward strategy from experimental data. The main goal is to design a feedforward voltage scheme that minimizes surface potential decay after contact, thereby reducing pressure drift. Some of your tasks will involve: * Analysis of dielectric relaxation and recovery measurements for ceramics and glassy dielectrics; * Modeling relaxation behavior using suitable time‑dependent models (e.g. multi‑exponential, stretched exponential, power law); * Designing feedforward voltage waveforms for compensation and quantitative comparison with uncompensated cases; * Proposing a standardized compensation strategy suitable for representative system testing; * A final technical report and presentation with recommendations for implementation. This is a Master internship for 6 to 9 months, working minimum 4 days per week. This topic is also suitable for a thesis. The start date is as soon as possible or the latest around August/September 2026.
