


We are offering an internship opportunity for students interested in physical transport phenomena and modeling. This internship provides exposure to low pressure chemical vapor deposition (CVD) and atomic layer deposition (ALD) vertical furnace batch reactors for the semiconductor industry to create thin films of semiconductor, dielectric and metal materials on Silicon substrates through practical design of a heating element for low temperature applications. Key Learning Objectives: Gain experience in heating element design for CVD and ALD applications. Practical characterization of current heating element at low temperature. Learn and apply physical transport phenomena (i.e. energy transfer by conduction, convection, radiation). Develop a thermal model for a heating element concept suitable for low temperature applications. Use thermal model to optimize design parameters to meet specifications for the heating element performance. Key Responsibilities: Perform heating element characterization and interpret results. Set-up model for heating element and analyze results. Present progress in weekly meeting. Collaborate and discuss results with engineers and scientists. Document results.